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Chapter title |
Novel Approach for Visualizing Implants in Deep Submicron Microelectronic Devices Using Dopant Selective Etching and Low keV SEM
|
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Chapter number | 87 |
Book title |
Microscopy of Semiconducting Materials 2007
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Published in |
ADS, January 2008
|
DOI | 10.1007/978-1-4020-8615-1_87 |
Book ISBNs |
978-1-4020-8614-4, 978-1-4020-8615-1
|
Authors |
Y Chakk, I Vidoshinsky, R Razilov, Chakk, Y, Vidoshinsky, I, Razilov, R |