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Chapter title |
Dopant Profiling of Silicon Calibration Specimens by Off-Axis Electron Holography
|
---|---|
Chapter number | 86 |
Book title |
Microscopy of Semiconducting Materials 2007
|
Published in |
ADS, January 2008
|
DOI | 10.1007/978-1-4020-8615-1_86 |
Book ISBNs |
978-1-4020-8614-4, 978-1-4020-8615-1
|
Authors |
D Cooper, R Truche, F Laugier, F Bertin, A Chabli, Cooper, D, Truche, R, Laugier, F, Bertin, F, Chabli, A |