You are seeing a free-to-access but limited selection of the activity Altmetric has collected about this research output.
Click here to find out more.
Mendeley readers
Chapter title |
Electron Energy-Loss Spectrum Imaging of an HfSiO High- k Dielectric Stack with a TaN Metal Gate
|
---|---|
Chapter number | 68 |
Book title |
Microscopy of Semiconducting Materials 2007
|
Published in |
ADS, January 2008
|
DOI | 10.1007/978-1-4020-8615-1_68 |
Book ISBNs |
978-1-4020-8614-4, 978-1-4020-8615-1
|
Authors |
M MacKenzie, A J Craven, D W McComb, C M McGilvery, S McFadzean, S De Gendt, MacKenzie, M, Craven, A J, McComb, D W, McGilvery, C M, McFadzean, S, Gendt, S De |
Mendeley readers
The data shown below were compiled from readership statistics for 2 Mendeley readers of this research output. Click here to see the associated Mendeley record.
Geographical breakdown
Country | Count | As % |
---|---|---|
Unknown | 2 | 100% |
Demographic breakdown
Readers by professional status | Count | As % |
---|---|---|
Unspecified | 1 | 50% |
Unknown | 1 | 50% |
Readers by discipline | Count | As % |
---|---|---|
Unspecified | 1 | 50% |
Unknown | 1 | 50% |