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Chapter title |
Analytical STEM Comparative Study of the Incorporation of Covalent (Ge) or Heterovalent (As) Atoms in Silicon Crystal
|
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Chapter number | 77 |
Book title |
Microscopy of Semiconducting Materials 2007
|
Published in |
ADS, January 2008
|
DOI | 10.1007/978-1-4020-8615-1_77 |
Book ISBNs |
978-1-4020-8614-4, 978-1-4020-8615-1
|
Authors |
R Pantel, L Clement, L Rubaldo, G Borot, D Dutartre, Pantel, R, Clement, L, Rubaldo, L, Borot, G, Dutartre, D |