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Chapter title |
The Dielectric Properties of Co-Implanted SiO 2 Investigated Using Spatially-Resolved EELS
|
---|---|
Chapter number | 75 |
Book title |
Microscopy of Semiconducting Materials 2007
|
Published in |
ADS, January 2008
|
DOI | 10.1007/978-1-4020-8615-1_75 |
Book ISBNs |
978-1-4020-8614-4, 978-1-4020-8615-1
|
Authors |
V Stolojan, W Tsang, S R P Silva, Stolojan, V, Tsang, W, Silva, S R P |