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Chapter title |
Pitch Polishing of Semiconductor Optical Materials Using Continuous Iterative Interferrogram Analysis
|
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Chapter number | 208 |
Book title |
Physics of Semiconductor Devices
|
Published by |
Springer, Cham, January 2014
|
DOI | 10.1007/978-3-319-03002-9_208 |
Book ISBNs |
978-3-31-903001-2, 978-3-31-903002-9
|
Authors |
Neeraj Pandey, K. K. Pant, S. Mishra, L. M. Pant, A. Ghosh, Pandey, Neeraj, Pant, K. K., Mishra, S., Pant, L. M., Ghosh, A. |