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Chapter title |
PECVD Grown SiC Cantilevers with Dry and Wet Release
|
---|---|
Chapter number | 105 |
Book title |
Physics of Semiconductor Devices
|
Published by |
Springer, Cham, January 2014
|
DOI | 10.1007/978-3-319-03002-9_105 |
Book ISBNs |
978-3-31-903001-2, 978-3-31-903002-9
|
Authors |
Adithi Umamaheswara, Smitha Nair, Lavendra, Suman Gupta, M. N. Vijayaraghavan, Navakanta Bhat, Umamaheswara, Adithi, Nair, Smitha, Gupta, Suman, Vijayaraghavan, M. N., Bhat, Navakanta |