You are seeing a free-to-access but limited selection of the activity Altmetric has collected about this research output.
Click here to find out more.
Chapter title |
Stress Induced Degradation in Sputtered ZrO 2 Thin Films on Silicon for Nano-MOSFET’s
|
---|---|
Chapter number | 139 |
Book title |
Physics of Semiconductor Devices
|
Published by |
Springer, Cham, January 2014
|
DOI | 10.1007/978-3-319-03002-9_139 |
Book ISBNs |
978-3-31-903001-2, 978-3-31-903002-9
|
Authors |
Ashwath Rao, Joyline Dsa, Saurabh Goyal, B. R. Singh, Rao, Ashwath, Dsa, Joyline, Goyal, Saurabh, Singh, B. R. |