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Chapter title |
Design and Fabrication of Computer Generated Hologram for Virtual Projection of a Reticle Pattern
|
---|---|
Chapter number | 238 |
Book title |
Physics of Semiconductor Devices
|
Published by |
Springer, Cham, January 2014
|
DOI | 10.1007/978-3-319-03002-9_238 |
Book ISBNs |
978-3-31-903001-2, 978-3-31-903002-9
|
Authors |
Alpana Bhagatji, Amit K. Agarwal, G. Unnikrishnan, Bhagatji, Alpana, Agarwal, Amit K., Unnikrishnan, G. |