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Chapter title |
Electron Beam Lithography for Fabrication of Sub 250 nm T Gates for AlGaAs/InGaAs PHEMT Based MMICs
|
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Chapter number | 32 |
Book title |
Physics of Semiconductor Devices
|
Published by |
Springer, Cham, January 2014
|
DOI | 10.1007/978-3-319-03002-9_32 |
Book ISBNs |
978-3-31-903001-2, 978-3-31-903002-9
|
Authors |
R. K. Khatri, S. S. Sarkar, A. Rudra, Mahadev Bhat, A. A. Naik, Ashok Kumar, B. K. Sehgal, R. Muralidharan, Khatri, R. K., Sarkar, S. S., Rudra, A., Bhat, Mahadev, Naik, A. A., Kumar, Ashok, Sehgal, B. K., Muralidharan, R. |