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Chapter title |
Design Aspects of a MEMS Based Bi-axial Mirror
|
---|---|
Chapter number | 107 |
Book title |
Physics of Semiconductor Devices
|
Published by |
Springer, Cham, January 2014
|
DOI | 10.1007/978-3-319-03002-9_107 |
Book ISBNs |
978-3-31-903001-2, 978-3-31-903002-9
|
Authors |
Aklesh Kumar Meena, Ranvir Singh, Yashoda Parmar, Vinita Gond, M. Islam, Amita Gupta, Meena, Aklesh Kumar, Singh, Ranvir, Parmar, Yashoda, Gond, Vinita, Islam, M., Gupta, Amita |