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Chapter title |
Design of a Piezoresistive MEMS Resonator Operating Beyond 1 GHz
|
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Chapter number | 115 |
Book title |
Physics of Semiconductor Devices
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Published by |
Springer, Cham, January 2014
|
DOI | 10.1007/978-3-319-03002-9_115 |
Book ISBNs |
978-3-31-903001-2, 978-3-31-903002-9
|
Authors |
Vikrama Vamshi Pasula, Deleep R. Nair, Amitava DasGupta, Pasula, Vikrama Vamshi, Nair, Deleep R., DasGupta, Amitava |