↓ Skip to main content

Wafer Bonding

Overview of attention for book
Cover of 'Wafer Bonding'

Table of Contents

  1. Altmetric Badge
    Book Overview
  2. Altmetric Badge
    Chapter 1 Direct Bonding, Fusion Bonding, Anodic Bonding, Wafer Bonding: A Historical Patent Picture of the Worldwide Moving Front of the State-of-the-Art of Contact Bonding
  3. Altmetric Badge
    Chapter 2 Basics of Silicon-on-Insulator (SOI) Technology
  4. Altmetric Badge
    Chapter 3 Silicon-on-insulator by the Smart Cut™ Process
  5. Altmetric Badge
    Chapter 4 ELTRAN® Technology Based on Wafer Bonding and Porous Silicon
  6. Altmetric Badge
    Chapter 5 Wafer Bonding for High-Performance Logic Applications
  7. Altmetric Badge
    Chapter 6 Application of Bonded Wafers to the Fabrication of Electronic Devices
  8. Altmetric Badge
    Chapter 7 Compound Semiconductor Heterostructures by Smart Cut™: SiC On Insulator, QUASIC™ Substrates, InP and GaAs Heterostructures on Silicon
  9. Altmetric Badge
    Chapter 8 Three-Dimensional Photonic Bandgap Crystals by Wafer Bonding Approach
  10. Altmetric Badge
    Chapter 9 Wafer Direct Bonding for High-Brightness Light-Emitting Diodes and Vertical-Cavity Surface-Emitting Lasers
  11. Altmetric Badge
    Chapter 10 High-Density Hybrid Integration of III–V Compound Optoelectronics with Silicon Integrated Circuits
  12. Altmetric Badge
    Chapter 11 Layer Transfer by Bonding and Laser Lift-Off
  13. Altmetric Badge
    Chapter 12 Single-Crystal Lithium Niobate Films by Crystal Ion Slicing
  14. Altmetric Badge
    Chapter 13 Wafer Bonding of Ferroelectric Materials
  15. Altmetric Badge
    Chapter 14 Debonding of Wafer-Bonded Interfaces for Handling and Transfer Applications
Overall attention for this book and its chapters
Altmetric Badge

Mentioned by

wikipedia
2 Wikipedia pages

Citations

dimensions_citation
80 Dimensions

Readers on

mendeley
10 Mendeley
You are seeing a free-to-access but limited selection of the activity Altmetric has collected about this research output. Click here to find out more.
Title
Wafer Bonding
Published by
Springer Berlin Heidelberg, March 2013
DOI 10.1007/978-3-662-10827-7
ISBNs
978-3-64-205915-5, 978-3-66-210827-7
Editors

Alexe, Marin, Gösele, Ulrich

Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 10 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Unknown 10 100%

Demographic breakdown

Readers by professional status Count As %
Student > Master 1 10%
Unknown 9 90%
Readers by discipline Count As %
Engineering 1 10%
Unknown 9 90%