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Introduction to Focused Ion Beams : Instrumentation, Theory, Techniques and Practice

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Cover of 'Introduction to Focused Ion Beams : Instrumentation, Theory, Techniques and Practice'

Table of Contents

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    Book Overview
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    Chapter 1 The Focused Ion Beam Instrument
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    Chapter 2 Ion - Solid Interactions
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    Chapter 3 Focused Ion Beam Gases for Deposition and Enhanced Etch
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    Chapter 4 Three-Dimensional Nanofabrication Using Focused Ion Beams
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    Chapter 5 Device Edits and Modifications
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    Chapter 6 The Uses of Dual Beam FIB in Microelectronic Failure Analysis
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    Chapter 7 High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy
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    Chapter 8 FIB for Materials Science Applications - a Review
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    Chapter 9 Practical Aspects of FIB Tem Specimen Preparation
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    Chapter 10 FIB Lift-Out Specimen Preparation Techniques
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    Chapter 11 A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method
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    Chapter 12 Dual-Beam (FIB-SEM) Systems
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    Chapter 13 Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS)
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    Chapter 14 Quantitative Three-Dimensional Analysis Using Focused Ion Beam Microscopy
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    Chapter 15 Application of FIB in Combination with Auger Electron Spectroscopy
Attention for Chapter 15: Application of FIB in Combination with Auger Electron Spectroscopy
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