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Introduction to Focused Ion Beams : Instrumentation, Theory, Techniques and Practice

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Cover of 'Introduction to Focused Ion Beams : Instrumentation, Theory, Techniques and Practice'

Table of Contents

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    Book Overview
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    Chapter 1 The Focused Ion Beam Instrument
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    Chapter 2 Ion - Solid Interactions
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    Chapter 3 Focused Ion Beam Gases for Deposition and Enhanced Etch
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    Chapter 4 Three-Dimensional Nanofabrication Using Focused Ion Beams
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    Chapter 5 Device Edits and Modifications
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    Chapter 6 The Uses of Dual Beam FIB in Microelectronic Failure Analysis
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    Chapter 7 High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy
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    Chapter 8 FIB for Materials Science Applications - a Review
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    Chapter 9 Practical Aspects of FIB Tem Specimen Preparation
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    Chapter 10 FIB Lift-Out Specimen Preparation Techniques
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    Chapter 11 A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method
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    Chapter 12 Dual-Beam (FIB-SEM) Systems
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    Chapter 13 Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS)
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    Chapter 14 Quantitative Three-Dimensional Analysis Using Focused Ion Beam Microscopy
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    Chapter 15 Application of FIB in Combination with Auger Electron Spectroscopy
Attention for Chapter 12: Dual-Beam (FIB-SEM) Systems
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Readers on

mendeley
53 Mendeley
Summary
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Chapter title
Dual-Beam (FIB-SEM) Systems
Chapter number 12
Book title
Introduction to Focused Ion Beams
Published in
ADS, January 2005
DOI 10.1007/0-387-23313-x_12
Book ISBNs
978-0-387-23116-7, 978-0-387-23313-0
Authors

Richard J. Young, Mary V. Moore, Young, Richard J., Moore, Mary V.

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Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 53 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Germany 1 2%
Unknown 52 98%

Demographic breakdown

Readers by professional status Count As %
Student > Ph. D. Student 13 25%
Student > Master 9 17%
Researcher 6 11%
Student > Doctoral Student 3 6%
Other 3 6%
Other 5 9%
Unknown 14 26%
Readers by discipline Count As %
Physics and Astronomy 12 23%
Materials Science 11 21%
Engineering 9 17%
Agricultural and Biological Sciences 2 4%
Chemistry 2 4%
Other 3 6%
Unknown 14 26%

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