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Introduction to Focused Ion Beams : Instrumentation, Theory, Techniques and Practice

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Cover of 'Introduction to Focused Ion Beams : Instrumentation, Theory, Techniques and Practice'

Table of Contents

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    Book Overview
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    Chapter 1 The Focused Ion Beam Instrument
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    Chapter 2 Ion - Solid Interactions
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    Chapter 3 Focused Ion Beam Gases for Deposition and Enhanced Etch
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    Chapter 4 Three-Dimensional Nanofabrication Using Focused Ion Beams
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    Chapter 5 Device Edits and Modifications
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    Chapter 6 The Uses of Dual Beam FIB in Microelectronic Failure Analysis
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    Chapter 7 High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy
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    Chapter 8 FIB for Materials Science Applications - a Review
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    Chapter 9 Practical Aspects of FIB Tem Specimen Preparation
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    Chapter 10 FIB Lift-Out Specimen Preparation Techniques
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    Chapter 11 A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method
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    Chapter 12 Dual-Beam (FIB-SEM) Systems
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    Chapter 13 Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS)
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    Chapter 14 Quantitative Three-Dimensional Analysis Using Focused Ion Beam Microscopy
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    Chapter 15 Application of FIB in Combination with Auger Electron Spectroscopy
Attention for Chapter 10: FIB Lift-Out Specimen Preparation Techniques
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mendeley
25 Mendeley
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Chapter title
FIB Lift-Out Specimen Preparation Techniques
Chapter number 10
Book title
Introduction to Focused Ion Beams
Published in
ADS, January 2005
DOI 10.1007/0-387-23313-x_10
Book ISBNs
978-0-387-23116-7, 978-0-387-23313-0
Authors

L. A. Giannuzzi, B. W. Kempshall, S. M. Schwarz, J. K. Lomness, B. I. Prenitzer, F. A. Stevie, Giannuzzi, L. A., Kempshall, B. W., Schwarz, S. M., Lomness, J. K., Prenitzer, B. I., Stevie, F. A.

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Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 25 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Unknown 25 100%

Demographic breakdown

Readers by professional status Count As %
Researcher 2 8%
Student > Master 2 8%
Other 1 4%
Student > Ph. D. Student 1 4%
Unknown 19 76%
Readers by discipline Count As %
Engineering 2 8%
Chemistry 2 8%
Materials Science 1 4%
Unknown 20 80%

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