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Introduction to Focused Ion Beams : Instrumentation, Theory, Techniques and Practice

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Cover of 'Introduction to Focused Ion Beams : Instrumentation, Theory, Techniques and Practice'

Table of Contents

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    Book Overview
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    Chapter 1 The Focused Ion Beam Instrument
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    Chapter 2 Ion - Solid Interactions
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    Chapter 3 Focused Ion Beam Gases for Deposition and Enhanced Etch
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    Chapter 4 Three-Dimensional Nanofabrication Using Focused Ion Beams
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    Chapter 5 Device Edits and Modifications
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    Chapter 6 The Uses of Dual Beam FIB in Microelectronic Failure Analysis
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    Chapter 7 High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy
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    Chapter 8 FIB for Materials Science Applications - a Review
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    Chapter 9 Practical Aspects of FIB Tem Specimen Preparation
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    Chapter 10 FIB Lift-Out Specimen Preparation Techniques
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    Chapter 11 A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method
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    Chapter 12 Dual-Beam (FIB-SEM) Systems
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    Chapter 13 Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS)
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    Chapter 14 Quantitative Three-Dimensional Analysis Using Focused Ion Beam Microscopy
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    Chapter 15 Application of FIB in Combination with Auger Electron Spectroscopy
Attention for Chapter 15: Application of FIB in Combination with Auger Electron Spectroscopy
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Citations

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Summary Dimensions citations
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Chapter title
Application of FIB in Combination with Auger Electron Spectroscopy
Chapter number 15
Book title
Introduction to Focused Ion Beams
Published in
ADS, January 2005
DOI 10.1007/0-387-23313-x_15
Book ISBNs
978-0-387-23116-7, 978-0-387-23313-0
Authors

E. L. Principe, Principe, E. L.

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Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 9 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Unknown 9 100%

Demographic breakdown

Readers by professional status Count As %
Student > Ph. D. Student 3 33%
Researcher 2 22%
Unknown 4 44%
Readers by discipline Count As %
Physics and Astronomy 2 22%
Engineering 2 22%
Materials Science 1 11%
Business, Management and Accounting 1 11%
Unknown 3 33%

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