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Electrical Atomic Force Microscopy for Nanoelectronics

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Cover of 'Electrical Atomic Force Microscopy for Nanoelectronics'

Table of Contents

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    Book Overview
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    Chapter 1 The Atomic Force Microscopy for Nanoelectronics
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    Chapter 2 Conductive AFM for Nanoscale Analysis of High-k Dielectric Metal Oxides
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    Chapter 3 Mapping Conductance and Carrier Distributions in Confined Three-Dimensional Transistor Structures
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    Chapter 4 Scanning Capacitance Microscopy for Two-Dimensional Carrier Profiling of Semiconductor Devices
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    Chapter 5 Oxidation and Thermal Scanning Probe Lithography for High-Resolution Nanopatterning and Nanodevices
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    Chapter 6 Characterizing Ferroelectricity with an Atomic Force Microscopy: An All-Around Technique
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    Chapter 7 Electrical AFM for the Analysis of Resistive Switching
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    Chapter 8 Magnetic Force Microscopy for Magnetic Recording and Devices
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    Chapter 9 Space Charge at Nanoscale: Probing Injection and Dynamic Phenomena Under Dark/Light Configurations by Using KPFM and C-AFM
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    Chapter 10 Conductive AFM of 2D Materials and Heterostructures for Nanoelectronics
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    Chapter 11 Diamond Probes Technology
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    Chapter 12 Scanning Microwave Impedance Microscopy (sMIM) in Electronic and Quantum Materials
Attention for Chapter 6: Characterizing Ferroelectricity with an Atomic Force Microscopy: An All-Around Technique
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