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Chapter title |
Cryogenic Investigations of SIMOX Buried Oxide Parameters
|
---|---|
Chapter number | 11 |
Book title |
Progress in SOI Structures and Devices Operating at Extreme Conditions
|
Published by |
Springer, Dordrecht, January 2002
|
DOI | 10.1007/978-94-010-0339-1_11 |
Book ISBNs |
978-1-4020-0576-3, 978-9-40-100339-1
|
Authors |
V. S. Lysenko, I. P. Tyagulski, I. N. Osiyuk, Y. V. Gomeniuk, Lysenko, V. S., Tyagulski, I. P., Osiyuk, I. N., Gomeniuk, Y. V. |