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Chapter title |
Low Dimension Properties of Nanostructures on Ultrathin Layers of Silicon Formed by Oxidation of Ion Cut SOI Wafers and Electron Lithography
|
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Chapter number | 6 |
Book title |
Progress in SOI Structures and Devices Operating at Extreme Conditions
|
Published by |
Springer, Dordrecht, January 2002
|
DOI | 10.1007/978-94-010-0339-1_6 |
Book ISBNs |
978-1-4020-0576-3, 978-9-40-100339-1
|
Authors |
V. P. Popov, A. L. Aseev, I. V. Antonova, Yu. V. Nastaushev, T. A. Gavrilova, O. V. Naumova, A. A. Franzusov, G. N. Feafanov, V. A. Kolosanov, Popov, V. P., Aseev, A. L., Antonova, I. V., Nastaushev, Yu. V., Gavrilova, T. A., Naumova, O. V., Franzusov, A. A., Feafanov, G. N., Kolosanov, V. A. |