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Chapter title |
Temperature Dependent Thermal Conductivities of CMOS Layers by Micromachined Thermal van der Pauw Test Structures
|
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Chapter number | 323 |
Book title |
Transducers ’01 Eurosensors XV
|
Published by |
Springer, Berlin, Heidelberg, January 2001
|
DOI | 10.1007/978-3-642-59497-7_323 |
Book ISBNs |
978-3-54-042150-4, 978-3-64-259497-7
|
Authors |
S. Hafizovic, O. Paul, Hafizovic, S., Paul, O. |