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Chapter title |
Micromachining of Piezoelectric MEMS
|
---|---|
Chapter number | 141 |
Book title |
Transducers ’01 Eurosensors XV
|
Published by |
Springer, Berlin, Heidelberg, January 2001
|
DOI | 10.1007/978-3-642-59497-7_141 |
Book ISBNs |
978-3-54-042150-4, 978-3-64-259497-7
|
Authors |
J. Baborowski, N. Ledermann, S. Gentil, P. Muralt, Baborowski, J., Ledermann, N., Gentil, S., Muralt, P. |