Transducers
Springer
Chapter title |
A Bulk-Micromachined Single Crystal Silicon Gyroscope Operating at Atmospheric Pressure
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Chapter number | 113 |
Book title |
Transducers ’01 Eurosensors XV
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Published by |
Springer, Berlin, Heidelberg, January 2001
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DOI | 10.1007/978-3-642-59497-7_113 |
Book ISBNs |
978-3-54-042150-4, 978-3-64-259497-7
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Authors |
Seong-Hyok Kim, June-Young Lee, Che-Heung Kim, Yong-Kweon Kim, Kim, Seong-Hyok, Lee, June-Young, Kim, Che-Heung, Kim, Yong-Kweon |