Transducers
Springer
Chapter title |
Single Crystalline Silicon Nano Wire Piezoresistors for Mechanical Sensors
|
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Chapter number | 230 |
Book title |
Transducers ’01 Eurosensors XV
|
Published by |
Springer, Berlin, Heidelberg, January 2001
|
DOI | 10.1007/978-3-642-59497-7_230 |
Book ISBNs |
978-3-54-042150-4, 978-3-64-259497-7
|
Authors |
Toshiyuki Toriyama, Yasutada Tanimoto, Susumu Sugiyama, Toriyama, Toshiyuki, Tanimoto, Yasutada, Sugiyama, Susumu |