Transducers
Springer
Chapter title |
Silicon Microphones with Low Stress Membranes
|
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Chapter number | 29 |
Book title |
Transducers ’01 Eurosensors XV
|
Published by |
Springer, Berlin, Heidelberg, January 2001
|
DOI | 10.1007/978-3-642-59497-7_29 |
Book ISBNs |
978-3-54-042150-4, 978-3-64-259497-7
|
Authors |
Marc Füldner, A. Dehé, R. Aigner, T. Bever, R. Lerch, Füldner, Marc, Dehé, A., Aigner, R., Bever, T., Lerch, R. |
Country | Count | As % |
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Unknown | 1 | 100% |
Readers by professional status | Count | As % |
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Researcher | 1 | 100% |
Readers by discipline | Count | As % |
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Engineering | 1 | 100% |