Transducers
Springer
Chapter title |
Fabrication of Various Shapes Nano Structure using Si Anisotropic Etching and Silicidation
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Chapter number | 251 |
Book title |
Transducers ’01 Eurosensors XV
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Published by |
Springer, Berlin, Heidelberg, January 2001
|
DOI | 10.1007/978-3-642-59497-7_251 |
Book ISBNs |
978-3-54-042150-4, 978-3-64-259497-7
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Authors |
Kuniyuki Kakushima, Makoto Mita, Yoshio Mita, Gen Hashiguchi, Hiroyuki Fujita, Kakushima, Kuniyuki, Mita, Makoto, Mita, Yoshio, Hashiguchi, Gen, Fujita, Hiroyuki |