Transducers
Springer
Chapter title |
Surface Micromachining Process for C-Si as Active Material
|
---|---|
Chapter number | 147 |
Book title |
Transducers ’01 Eurosensors XV
|
Published by |
Springer, Berlin, Heidelberg, January 2001
|
DOI | 10.1007/978-3-642-59497-7_147 |
Book ISBNs |
978-3-54-042150-4, 978-3-64-259497-7
|
Authors |
Andras Kovacs, Ulrich M. Mescheder, Kovacs, Andras, Mescheder, Ulrich M. |
Country | Count | As % |
---|---|---|
Unknown | 1 | 100% |
Readers by professional status | Count | As % |
---|---|---|
Other | 1 | 100% |
Readers by discipline | Count | As % |
---|---|---|
Engineering | 1 | 100% |