Transducers
Springer
Chapter title |
Fabrication of an Electrostatic Lens Array with Separate Electrodes and Shield Membranes Using the UV-Liga Process
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Chapter number | 368 |
Book title |
Transducers ’01 Eurosensors XV
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Published by |
Springer, Berlin, Heidelberg, January 2001
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DOI | 10.1007/978-3-642-59497-7_368 |
Book ISBNs |
978-3-54-042150-4, 978-3-64-259497-7
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Authors |
Haruhito Ono, Kenichi Nagae, Yasuhiro Shimada, Hiroshi Maehara, Takayuki Yagi, Masato Muraki, Masahiko Okunuki, Ono, Haruhito, Nagae, Kenichi, Shimada, Yasuhiro, Maehara, Hiroshi, Yagi, Takayuki, Muraki, Masato, Okunuki, Masahiko |