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Chapter title |
Micro- and Nanopatterning of Sensor Chips by Means of Macroporous Silicon
|
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Chapter number | 152 |
Book title |
Transducers ’01 Eurosensors XV
|
Published by |
Springer, Berlin, Heidelberg, January 2001
|
DOI | 10.1007/978-3-642-59497-7_152 |
Book ISBNs |
978-3-54-042150-4, 978-3-64-259497-7
|
Authors |
A. Kurowski, J. W. Schultze, H. Lüth, M. J. Schöning, Kurowski, A., Schultze, J. W., Lüth, H., Schöning, M. J. |