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Chapter title |
Statistical Accuracy and CPU Time Characteristic of Three Trajectory Split Methods for Monte Carlo Simulation of Ion Implantation
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Chapter number | 119 |
Book title |
Simulation of Semiconductor Devices and Processes
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Published by |
Springer, Vienna, January 1995
|
DOI | 10.1007/978-3-7091-6619-2_119 |
Book ISBNs |
978-3-70-917363-3, 978-3-70-916619-2
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Authors |
W. Bohmayr, A. Burenkov, J. Lorenz, H. Ryssel, S. Selberherr |