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Simulation of Semiconductor Devices and Processes

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Table of Contents

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    Book Overview
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    Chapter 1 Numerical Modelling and Materials Characterisation for Integrated Micro Electro Mechanical Systems
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    Chapter 2 Fast and Accurate Aerial Imaging Simulation for Layout Printability Optimization
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    Chapter 3 Efficient and Rigorous 3D Model for Optical Lithography Simulation
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    Chapter 4 Application of the Two-dimensional Numerical Simulation for the Description of Semiconductor Gas Sensors
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    Chapter 5 Analysis of Piezoresistive Effects in Silicon Structures Using Multidimensional Process and Device Simulation
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    Chapter 6 Modeling of magnetic-field-sensitive GaAs devices using 3D Monte Carlo simulation
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    Chapter 7 Quasi Three-Dimensional Simulation of Heat Transport in Thermal-Based Microsensors
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    Chapter 8 Simulating Deep Sub-Micron Technologies: An Industrial Perspective
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    Chapter 9 An Improved Calibration Methodology for Modeling Advanced Isolation Technologies
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    Chapter 10 Algorithms for the Reduction of Surface Evolution Discretization Error
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    Chapter 11 Polygonal Geometry Reconstruction after Cellular Etching or Deposition Simulation
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    Chapter 12 A Data-Model for a Technology and Simulation Archive
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    Chapter 13 A Programmable Tool for Interactive Wafer-State Level Data Processing
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    Chapter 14 Layout Design Rule Generation with TCAD Tools for Manufacturing
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    Chapter 15 ALAMODE: A Layered Model Development Environment
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    Chapter 16 TCAD Optimization Based on Task-Level Framework Services
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    Chapter 17 Cellular Automata Simulation of GaAs-IMPATT-Diodes
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    Chapter 18 Two-Dimensional Simulation of Deep-Trap Effects in GaAs MESFETs with Different Types of Surface States
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    Chapter 19 An Efficient Numerical Method to Solve the Time-Dependent Semiconductor Equations Including Trapped Charge
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    Chapter 20 Advances in Numerical Methods for Convective Hydrodynamic Model of Semiconductor Devices
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    Chapter 21 An Advanced Cellular Automaton Method with Interpolated Flux Scheme and its Application to Modeling of Gate Currents in Si MOSFETs
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    Chapter 22 Piezoresistance and the Drift-Diffusion Model in Strained Silicon
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    Chapter 23 A Novel Approach to HF-Noise Characterization of Heterojunction Bipolar Transistors
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    Chapter 24 Ge Profile for Minimum Neutral Base Transit Time in Si/Si 1-y Ge y Heterojunction Bipolar Transistors
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    Chapter 25 Performance optimization in Si/SiGe heterostructure FETs
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    Chapter 26 On the Integral Representations of Electrical Characteristics in Si Devices
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    Chapter 27 Large Signal Frequency Domain Device Analysis Via the Harmonic Balance Technique
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    Chapter 28 A Method for Extracting the Threshold Voltage of MOSFETs Based on Current Components
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    Chapter 29 2-D MOSFET Simulation by Self-Consistent Solution of the Boltzmann and Poisson Equations Using a Generalized Spherical Harmonic Expansion
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    Chapter 30 Ultra High Performance, Low Power 0.2 µ m CMOS Microprocessor Technology and TCAD Requirements
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    Chapter 31 Viscoelastic Modeling of Titanium Silicidation
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    Chapter 32 Multidimensional Nonlinear Viscoelastic Oxidation Modeling
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    Chapter 33 Three-Dimensional Integrated Process Simulator: 3D-MIPS
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    Chapter 34 Effect of Process-Induced Mechanical Stress on Circuit Layout
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    Chapter 35 The Simulation System for Three-Dimensional Capacitance and Current Density Calculation with a User Friendly GUI
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    Chapter 36 Numerical and analytical modelling of head resistances of diffused resistors
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    Chapter 37 New Spreading Resistance Effect For Sub-0.50 µ m MOSFETs: Model and Simulation
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    Chapter 38 The Role of SEMATECH in Enabling Global TCAD Collaboration
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    Chapter 39 Three Dimensional Simulation for Sputter Deposition Equipment and Processes
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    Chapter 40 Comprehensive Reactor, Plasma, and Profile Simulator for Plasma Etch Processes
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    Chapter 41 Modeling the Wafer Temperature in a LPCVD Furnace
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    Chapter 42 Determination of Electronic States in Low Dimensional Heterostructure and Quantum Wire Devices
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    Chapter 43 An Exponentially Fitted Finite Element Scheme for Diffusion Process Simulation on Coarse Grids
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    Chapter 44 Achievement of Quantitatively Accurate Simulation of Ion-Irradiated Bipolar Power Devices
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    Chapter 45 Modeling of Substrate Bias Effect in Bulk and SOI SiGe-channel p-MOSFETs
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    Chapter 46 A Very Fast Three-Dimensional Impurity Profile Simulation Incorporating An Accumulated Diffusion Length and Its Application to the Design of Power MOSFETs
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    Chapter 47 Recovery of Vectorial Fields and Currents in Multidimensional Simulation
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    Chapter 48 An Efficient Approach to Solving The Boltzmann Transport Equation in Ultra-fast Transient Situations
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    Chapter 49 Modeling of a Hot Electron Injection Laser
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    Chapter 50 Scaling Considerations of Bipolar Transistors using 3D Device Simulation
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    Chapter 51 Three-Dimensional Monte Carlo Simulation of Boron Implantation into <100>Single-Crystal Silicon Considering Mask Structure
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    Chapter 52 A fully 2D, Analytical Model for the Geometry and Voltage Dependence of Threshold Voltage in Submicron MOSFET’s
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    Chapter 53 On the influence of band structure and scattering rates on hot electron modeling
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    Chapter 54 Finite Element Monte Carlo Simulation of Recess Gate FETs
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    Chapter 55 Coupled 2D-microscopic/macroscopic simulation of nanoelectronic heterojunction devices
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    Chapter 56 On the Discretization of van Roosbroeck’s Equations with Magnetic Field
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    Chapter 57 Modeling of Impact Ionization in a Quasi Deterministic 3D Particle Dynamics Semiconductor Device Simulation Program
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    Chapter 58 Accurate Modeling of Ti/TiN Thin Film Sputter Deposition Processes
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    Chapter 59 Monte Carlo Simulation of InP/InGaAs HBT with a Buried Subcollector
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    Chapter 60 Design and Optimization of Millimeter-Wave IMPATT Oscillators Using a Consistent Model for Active and Passive Circuit Parts
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    Chapter 61 Generalised Drift-Diffusion Model of Bipolar Transport in Semiconductors
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    Chapter 62 Efficient 3D Unstructured Grid Algorithms for Modelling of Chemical Vapour Deposition in Horizontal Reactors
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    Chapter 63 Preventing critical conditions in IGBT chopper circuits by a multi-step gate drive mode
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    Chapter 64 Control of Plasma Dynamics within Double-Gate-Turn-Off Thyristors (D-GTO)
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    Chapter 65 A Vector Level Control Function for Generalized Octree Mesh Generation
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    Chapter 66 Comparison of Hydrodynamic Formulations for Non-Parabolic Semiconductor Device Simulations
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    Chapter 67 Influence of Analytical MOSFET Model Quality on Analog Circuit Simulation
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    Chapter 68 2-D Adaptive Simulation of Dopant Implantation and Diffusion
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    Chapter 69 Optimization of a Recessed LOCOS using a tuned 2-D process simulator
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    Chapter 70 Simulation of Complex Planar Edge Termination Structures for Vertical IGBTs by Solving the Complete Semiconductor Device Equations
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    Chapter 71 Numerical Analysis of Hot-Electron Effects in GaAs MESFETs
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    Chapter 72 Capacitance Model of Microwave InP-Based Double Heterojunction Bipolar Transistors
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    Chapter 73 Estimation of the Charge Collection for the Soft-Error Immunity by the 3D-Device Simulation and the Quantitative Investigation
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    Chapter 74 D.C. Electrothermal Hybrid BJT Model for SPICE
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    Chapter 75 Alpha-Particle Induced Soft Error Rate Evaluation Tool and User Interface
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    Chapter 76 Hydrodynamic Modeling of Electronic Noise by the Transfer Impedance Method
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    Chapter 77 Monte Carlo Simulation of S-Type Negative Differential Conductance in Semiconductor Heterostructures
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    Chapter 78 Two-Barrier model for Description of Charge Carriers Transport Processes in Structures with Porous Silicon
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    Chapter 79 Monte-Carlo simulation of inverted hot carrier distribution under strong carrier-optical phonon scattering
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    Chapter 80 Algorithms and Models for Simulation of MOCVD of III-V Layers in the Planetary Reactor
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    Chapter 81 An Approach for Explaining Drift Phenomena in GTO Devices Using Numerical Device Simulation
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    Chapter 82 Parallel 3D Finite Element Power Semiconductor Device Simulator Based on Topologically Rectangular Grid
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    Chapter 83 Investigation of Silicon Carbide Diode Structures via Numerical Simulations Including Anisotropic Effects
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    Chapter 84 A new physical compact model of CLBTs for circuit simulation including two-dimensional calculations
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    Chapter 85 Combining 2D and 3D Device Simulation with Circuit Simulation for Optimising High-Efficiency Silicon Solar Cells
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    Chapter 86 A New Quasi-two Dimensional HEMT Model
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    Chapter 87 Simulations of the forward behaviour of hybrid Schottky-/pn-diodes
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    Chapter 88 HFET Breakdown Study by 2D and Quasi 2D Simulations: Topology Influence
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    Chapter 89 Investigation of GTO Turn-on in an Inverter Circuit at Low Temperatures using 2-D Electrothermal Simulation
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    Chapter 90 Large Scale Thermal Mixed Mode Device and Circuit Simulation
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    Chapter 91 Scaling of Conventional MOSFET’s to the 0.1-µm Regime
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    Chapter 92 Monte Carlo Simulation of Carrier Capture at Deep Centers for Silicon and Gallium Arsenide Devices
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    Chapter 93 A New Statistical Enhancement Technique in Parallelized Monte Carlo Device Simulation
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    Chapter 94 Stability Issues in Self-Consistent Monte Carlo-Poisson Simulations
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    Chapter 95 The Path Integral Monte Carlo Method for Quantum Transport on a Parallel Computer
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    Chapter 96 A Monte Carlo Transport Model Based on Spherical Harmonics Expansion of the Valence Bands
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    Chapter 97 Full-Band Monte Carlo Transport Calculation in an Integrated Simulation Platform
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    Chapter 98 On Particle-Mesh Coupling in Monte Carlo Semiconductor Device Simulation
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    Chapter 99 T 2 CAD: Total Design for Sub-um Process and Device Optimization with Technology-CAD
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    Chapter 100 Modelling Impact-Ionization in the Framework of the Spherical-Harmonics Expansion of the Boltzmann Transport Equation with Full-Band Structure Effects
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    Chapter 101 Impact Ionization Model Using Second- and Fourth-Order Moments of Distribution Function
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    Chapter 102 An Accurate NMOS Mobility Model for 0.25µm MOSFETs
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    Chapter 103 A 2-D modeling of Metal-Oxide-Polycrystalline Silicon-Silicon (MOPS) structures for the determination of interface state and grain boundary state distributions
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    Chapter 104 Sensitivity Analysis of an Industrial CMOS Process using RSM Techniques
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    Chapter 105 Process- and Devicesimulation of Very High Speed Vertical MOS Transistors
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    Chapter 106 Two-Dimensional Transient Simulation of Charge-Coupled Devices Using MINIMOS NT
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    Chapter 107 Determination of Vacancy Diffusivity in Silicon for Process Simulation
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    Chapter 108 Precipitation phenomena and transient diffusion/activation during high concentration boron annealing
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    Chapter 109 Modelling of silicon interstitial surface recombination velocity at non-oxidizing interfaces
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    Chapter 110 Efficient Hybrid Solution of Sparse Linear Systems
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    Chapter 111 Mesh Generation for 3D Process Simulation and the Moving Boundary Problem
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    Chapter 112 Three-Dimensional Grid Adaptation Using a Mixed-Element Decomposition Method
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    Chapter 113 Unified Grid Generation and Adaptation for Device Simulation
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    Chapter 114 Platinum Diffusion at Low Temperatures
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    Chapter 115 Lattice Monte-Carlo Simulations of Vacancy-Mediated Diffusion and Implications for Continuum Models of Coupled Diffusion
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    Chapter 116 A New Hydrodynamic Equation for Ion-Implantation Simulation
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    Chapter 117 Monte Carlo Simulation of Multiple-Species Ion Implantation and its Application to the Modeling of 0.1µ PMOS Devices
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    Chapter 118 Analytical Model for Phosphorus Large Angle Tilted Implantation
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    Chapter 119 Statistical Accuracy and CPU Time Characteristic of Three Trajectory Split Methods for Monte Carlo Simulation of Ion Implantation
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Title
Simulation of Semiconductor Devices and Processes
Published by
Springer Vienna, December 2012
DOI 10.1007/978-3-7091-6619-2
ISBNs
978-3-70-917363-3, 978-3-70-916619-2
Editors

Ryssel, Heiner, Pichler, Peter

Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 12 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
United Kingdom 1 8%
Unknown 11 92%

Demographic breakdown

Readers by professional status Count As %
Student > Ph. D. Student 1 8%
Unknown 11 92%
Readers by discipline Count As %
Engineering 1 8%
Unknown 11 92%