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Chapter title |
Determination of Vacancy Diffusivity in Silicon for Process Simulation
|
---|---|
Chapter number | 107 |
Book title |
Simulation of Semiconductor Devices and Processes
|
Published by |
Springer, Vienna, January 1995
|
DOI | 10.1007/978-3-7091-6619-2_107 |
Book ISBNs |
978-3-70-917363-3, 978-3-70-916619-2
|
Authors |
T. Shimizu, Y. Zaitsu, S. Matsumoto, E. Arai, M. Yoshida, T. Abe |