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Microelectronic Test Structures for CMOS Technology

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Cover of 'Microelectronic Test Structures for CMOS Technology'

Table of Contents

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    Book Overview
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    Chapter 1 Introduction
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    Chapter 2 Test Structure Basics
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    Chapter 3 Resistors
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    Chapter 4 Capacitors
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    Chapter 5 MOSFETs
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    Chapter 6 Ring Oscillators
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    Chapter 7 High-Speed Characterization
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    Chapter 8 Test Structures for SOI Technology
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    Chapter 9 Test Equipment and Measurements
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    Chapter 10 Data Analysis
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