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Chapter title |
Thermal Oxidation of Silicon
|
---|---|
Chapter number | 41 |
Book title |
The Physics and Technology of Amorphous SiO 2
|
Published by |
Springer, Boston, MA, January 1988
|
DOI | 10.1007/978-1-4613-1031-0_41 |
Book ISBNs |
978-1-4612-8301-0, 978-1-4613-1031-0
|
Authors |
A. G. Revesz, B. J. Mrstik, H. L. Hughes, Revesz, A. G., Mrstik, B. J., Hughes, H. L. |