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Chapter title |
Characteristics of SiO<Subscript>2</Subscript> and SiO<Subscript>X</Subscript>N<Subscript>Y</Subscript>, Obtained by Rapid Thermal Processes
|
---|---|
Chapter number | 47 |
Book title |
The Physics and Technology of Amorphous SiO 2
|
Published by |
Springer, Boston, MA, January 1988
|
DOI | 10.1007/978-1-4613-1031-0_47 |
Book ISBNs |
978-1-4612-8301-0, 978-1-4613-1031-0
|
Authors |
N. Chan Tung, Y. Cartini, R. Pantel, J. L. Buevoz, Tung, N. Chan, Cartini, Y., Pantel, R., Buevoz, J. L. |