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Chapter title |
Defects in Silicon-on-Insulator Structures Formed by O + Implantation: Their Dependence on Implantation Temperature
|
---|---|
Chapter number | 66 |
Book title |
The Physics and Technology of Amorphous SiO 2
|
Published by |
Springer, Boston, MA, January 1988
|
DOI | 10.1007/978-1-4613-1031-0_66 |
Book ISBNs |
978-1-4612-8301-0, 978-1-4613-1031-0
|
Authors |
T. J. Ennis, R. C. Barklie, K. Reeson, P. L. F. Hemment, Ennis, T. J., Barklie, R. C., Reeson, K., Hemment, P. L. F. |