The Physics and Technology of Amorphous SiO 2
Springer US
Chapter title |
Electrical and Interface Properties of MOS Structures of Getter Treated Silicon
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Chapter number | 39 |
Book title |
The Physics and Technology of Amorphous SiO 2
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Published by |
Springer, Boston, MA, January 1988
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DOI | 10.1007/978-1-4613-1031-0_39 |
Book ISBNs |
978-1-4612-8301-0, 978-1-4613-1031-0
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Authors |
N. M. Ravindra, Patrick Smith, J. Narayan, Ravindra, N. M., Smith, Patrick, Narayan, J. |