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Chapter title |
Use of <Superscript>18</Superscript>O Labelling to Study Growth Mechanisms in Dry Oxidation of Silicon
|
---|---|
Chapter number | 2 |
Book title |
The Physics and Chemistry of SiO 2 and the Si-SiO 2 Interface 2
|
Published by |
Springer, Boston, MA, January 1993
|
DOI | 10.1007/978-1-4899-1588-7_2 |
Book ISBNs |
978-1-4899-1590-0, 978-1-4899-1588-7
|
Authors |
Isabelle Trimaille, Stan I. Raider, Jean-Jacques Ganem, Serge Rigo, Nicholas A. Penebre |