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Chapter title |
Effects of Metallic Impurities upon thin Gate Oxide Integrity and Related Bulk Properties in CZ Si
|
---|---|
Chapter number | 24 |
Book title |
The Physics and Chemistry of SiO 2 and the Si-SiO 2 Interface 2
|
Published by |
Springer, Boston, MA, January 1993
|
DOI | 10.1007/978-1-4899-1588-7_24 |
Book ISBNs |
978-1-4899-1590-0, 978-1-4899-1588-7
|
Authors |
K.-C. Cho, J.-G. Park, Y.-S. Kwak, D.-J. Lee, D.-S. Lim, C-K. Shin, S. Hahn, W. L. Smith |