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Chapter title |
Researches of SiO 2 on InP and GaAs Mos Structures
|
---|---|
Chapter number | 40 |
Book title |
The Physics and Chemistry of SiO 2 and the Si-SiO 2 Interface 2
|
Published by |
Springer, Boston, MA, January 1993
|
DOI | 10.1007/978-1-4899-1588-7_40 |
Book ISBNs |
978-1-4899-1590-0, 978-1-4899-1588-7
|
Authors |
Y. K. Su, C. J. Hwang, J. D. Lin |