Design for Manufacturability and Yield for Nano-Scale CMOS

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Cover of 'Design for Manufacturability and Yield for Nano-Scale CMOS'

Table of Contents

Attention for Chapter 7: Yield Prediction

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Citations

dimensions_citation: 33 Dimensions

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So far, Dimensions has found 33 publications that cite this research output.

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Layout Design Rules: Definition, Setting, and Scaling

Book chapter (October 2022)

Preliminary study of photomask pattern inspection by beam-shaped knife-edge interferometry

Article in Precision Engineering (September 2022)

Chapter 10 Defect Tolerance in VLSI Circuits

Book chapter (January 2021)

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