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| Chapter title |
Systematic Yield - Lithography
|
|---|---|
| Chapter number | 3 |
| Book title |
Design for Manufacturability and Yield for Nano-Scale CMOS
|
| Published by |
Springer, Dordrecht, January 2007
|
| DOI | 10.1007/978-1-4020-5188-3_3 |
| Book ISBNs |
978-1-4020-5187-6, 978-1-4020-5188-3
|
| Authors |
Charles C. Chiang, Jamil Kawa, Chiang, Charles C., Kawa, Jamil |