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Design for Manufacturability and Yield for Nano-Scale CMOS

Overview of attention for book
Cover of 'Design for Manufacturability and Yield for Nano-Scale CMOS'

Table of Contents

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    Book Overview
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    Chapter 1 Introduction
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    Chapter 2 Random Defects
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    Chapter 3 Systematic Yield - Lithography
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    Chapter 4 Systematic Yield - Chemical Mechanical Polishing (CMP)
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    Chapter 5 Variability & Parametric Yield
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    Chapter 6 Design for Yield
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    Chapter 7 Yield Prediction
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    Chapter 8 Conclusions
Attention for Chapter 4: Systematic Yield - Chemical Mechanical Polishing (CMP)
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