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Low Pressure Plasmas and Microstructuring Technology

Overview of attention for book
Cover of 'Low Pressure Plasmas and Microstructuring Technology'

Table of Contents

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    Book Overview
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    Chapter 1 Introduction
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    Chapter 2 Collisions and cross sections
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    Chapter 3 The plasma
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    Chapter 4 DC discharges
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    Chapter 5 High-frequency discharges I
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    Chapter 6 High-frequency discharges II
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    Chapter 7 High-frequency discharges III
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    Chapter 8 Ion beam systems
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    Chapter 9 Plasma diagnostics
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    Chapter 10 Plasma deposition processes
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    Chapter 11 Plasma etch processes
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    Chapter 12 Etch Mechanisms
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    Chapter 13 Outlook
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    Chapter 14 Advanced Topics
Attention for Chapter 5: High-frequency discharges I
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