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| Chapter title |
Plasma etch processes
|
|---|---|
| Chapter number | 11 |
| Book title |
Low Pressure Plasmas and Microstructuring Technology
|
| Published by |
Springer, Berlin, Heidelberg, January 2009
|
| DOI | 10.1007/978-3-540-85849-2_11 |
| Book ISBNs |
978-3-54-085848-5, 978-3-54-085849-2
|
| Authors |
Gerhard Franz, Franz, Gerhard |