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Mendeley readers
| Chapter title |
Etch Mechanisms
|
|---|---|
| Chapter number | 12 |
| Book title |
Low Pressure Plasmas and Microstructuring Technology
|
| Published by |
Springer, Berlin, Heidelberg, January 2009
|
| DOI | 10.1007/978-3-540-85849-2_12 |
| Book ISBNs |
978-3-54-085848-5, 978-3-54-085849-2
|
| Authors |
Gerhard Franz, Franz, Gerhard |
Mendeley readers
The data shown below were compiled from readership statistics for 1 Mendeley reader of this research output. Click here to see the associated Mendeley record.
Geographical breakdown
| Country | Count | As % |
|---|---|---|
| Unknown | 1 | 100% |
Demographic breakdown
| Readers by professional status | Count | As % |
|---|---|---|
| Student > Doctoral Student | 1 | 100% |
| Readers by discipline | Count | As % |
|---|---|---|
| Physics and Astronomy | 1 | 100% |