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Chapter title |
High-frequency discharges II
|
---|---|
Chapter number | 6 |
Book title |
Low Pressure Plasmas and Microstructuring Technology
|
Published by |
Springer, Berlin, Heidelberg, January 2009
|
DOI | 10.1007/978-3-540-85849-2_6 |
Book ISBNs |
978-3-54-085848-5, 978-3-54-085849-2
|
Authors |
Gerhard Franz, Franz, Gerhard |