Chapter 1 Simulation of the Sputtering Process

Chapter 2 Electron Emission from Surfaces Induced by Slow Ions and Atoms

Chapter 3 Modeling of the Magnetron Discharge

Chapter 4 Modelling of Reactive Sputtering Processes

Chapter 5 Depositing Aluminium Oxide: A Case Study of Reactive Magnetron Sputtering

Chapter 6 Transport of Sputtered Particles Through the Gas Phase

Chapter 7 Energy Deposition at the Substrate in a Magnetron Sputtering System

Chapter 9 Optical Plasma Diagnostics During Reactive Magnetron Sputtering

Chapter 10 Reactive Magnetron Sputtering of Indium Tin Oxide Thin Films: The Cross-Corner and Cross-Magnetron Effect

Chapter 11 Reactively Sputter-Deposited Solid Electrolytes and Their Applications

Chapter 12 Reactive SputteredWide-Bandgap p-Type Semiconducting Spinel AB 2 O 4 and Delafossite ABO 2 Thin Films for “Transparent Electronics”

Chapter 13 Oxide-Based Electrochromic Materials and Devices Prepared by Magnetron Sputtering

Chapter 14 Atomic Assembly of Magnetoresistive Multilayers