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Reactive Sputter Deposition

Overview of attention for book
Attention for Chapter 5: Depositing Aluminium Oxide: A Case Study of Reactive Magnetron Sputtering
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Citations

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Chapter title
Depositing Aluminium Oxide: A Case Study of Reactive Magnetron Sputtering
Chapter number 5
Book title
Reactive Sputter Deposition
Published by
Springer, Berlin, Heidelberg, January 2008
DOI 10.1007/978-3-540-76664-3_5
Book ISBNs
978-3-54-076662-9, 978-3-54-076664-3
Authors

Diederik Depla, Stijn Mahieu, Roger De Gryse

Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 24 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Germany 1 4%
Netherlands 1 4%
Norway 1 4%
Belgium 1 4%
China 1 4%
Unknown 19 79%

Demographic breakdown

Readers by professional status Count As %
Researcher 7 29%
Student > Master 4 17%
Student > Ph. D. Student 4 17%
Student > Doctoral Student 3 13%
Student > Bachelor 3 13%
Other 2 8%
Unknown 1 4%
Readers by discipline Count As %
Materials Science 11 46%
Physics and Astronomy 7 29%
Engineering 5 21%
Unknown 1 4%