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Reactive Sputter Deposition

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Cover of 'Reactive Sputter Deposition'

Table of Contents

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    Book Overview
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    Chapter 1 Simulation of the Sputtering Process
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    Chapter 2 Electron Emission from Surfaces Induced by Slow Ions and Atoms
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    Chapter 3 Modeling of the Magnetron Discharge
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    Chapter 4 Modelling of Reactive Sputtering Processes
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    Chapter 5 Depositing Aluminium Oxide: A Case Study of Reactive Magnetron Sputtering
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    Chapter 6 Transport of Sputtered Particles Through the Gas Phase
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    Chapter 7 Energy Deposition at the Substrate in a Magnetron Sputtering System
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    Chapter 8 Process Diagnostics
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    Chapter 9 Optical Plasma Diagnostics During Reactive Magnetron Sputtering
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    Chapter 10 Reactive Magnetron Sputtering of Indium Tin Oxide Thin Films: The Cross-Corner and Cross-Magnetron Effect
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    Chapter 11 Reactively Sputter-Deposited Solid Electrolytes and Their Applications
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    Chapter 12 Reactive SputteredWide-Bandgap p-Type Semiconducting Spinel AB 2 O 4 and Delafossite ABO 2 Thin Films for “Transparent Electronics”
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    Chapter 13 Oxide-Based Electrochromic Materials and Devices Prepared by Magnetron Sputtering
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    Chapter 14 Atomic Assembly of Magnetoresistive Multilayers
Attention for Chapter 5: Depositing Aluminium Oxide: A Case Study of Reactive Magnetron Sputtering
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